Experimental Investigation into SLS Glass Surface Modification Using KrF Excimer Laser

  • Shahryar Nategh Department of Structural Engineering and Building Materials, Ghent University
  • Pieter Vijverman Department of Structural Engineering and Building Materials, Ghent University
  • Jeroen Missinne CMST, Ghent University and imec
  • Jan Belis Department of Structural Engineering and Building Materials, Ghent University

Abstract

Glass is a brittle material and any damage or modification of its surface may have a profound impact on the strength. To modify the glass surface, the precision of the instrument is determining for achieving the most reliable results. Nowadays, laser technology as a non-contact tool is employed as a glass cutting, drilling and holing tool in many applications such as sensors and optical communications. Along with high speed, flexibility, and scalability, lasers with short pulse duration can break the interatomic bonds before perturbing the lattice. Among lasers, excimer micromachining lasers have some advantages in terms of surface morphology, including depth control, edge quality, and minimizing peripheral thermal damage as the ablation process is more likely to be material-removing instead of heating. This article aims to examine the interaction of krypton fluoride (KrF) excimer laser with the soda-lime silica (SLS) glass by fabricating grooves and microholes.

How to Cite
NATEGH, Shahryar et al. Experimental Investigation into SLS Glass Surface Modification Using KrF Excimer Laser. Challenging Glass Conference Proceedings, [S.l.], v. 7, sep. 2020. ISSN 2589-8019. Available at: <https://journals.open.tudelft.nl/cgc/article/view/4485>. Date accessed: 23 sep. 2020. doi: https://doi.org/10.7480/cgc.7.4485.
Published
2020-09-04